Devices and systems with string drivers including high band gap material and methods of formation

ABSTRACT

A device includes a string driver comprising a channel region between a drain region and a source region. At least one of the channel region, the drain region, and the source region comprises a high band gap material. A gate region is adjacent and spaced from the high band gap material. The string driver is configured for high-voltage operation in association with an array of charge storage devices (e.g., 2D NAND or 3D NAND). Additional devices and systems (e.g., non-volatile memory systems) including the string drivers are disclosed, as are methods of forming the string drivers.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit, under 35 U.S.C. § 119(e), of U.S.Provisional Patent Application Ser. No. 62/551,353, filed Aug. 29, 2017,the disclosure of which is incorporated herein in its entirety by thisreference.

TECHNICAL FIELD

The disclosure, in various embodiments, relates generally to deviceswith non-volatile memory. More particularly, this disclosure relates todevices with NAND flash memory arrays in operable communication with atleast one string driver.

BACKGROUND

Memory provides data storage for electronic systems. Flash memory is oneof various memory types and has numerous uses in modern computers anddevices. A typical flash memory device may include a memory array thathas a large number of charge storage devices (e.g., memory cells, e.g.,non-volatile memory cells) arranged in rows and columns. In a NANDarchitecture type of flash memory, storage devices arranged in a columnare coupled in series, and the first storage device of the column iscoupled to a bit line. In “two-dimensional NAND” (which may also bereferred to herein as “2D NAND”), the storage devices are arranged inrow and column fashion along a horizontal surface. In “three-dimensionalNAND” (which may also be referred to herein as “3D NAND”), a type ofvertical memory, not only are the storage devices arranged in row andcolumn fashion in a horizontal array, but tiers of the horizontal arraysare stacked over one another to provide a “three-dimensional array” ofthe storage devices.

In 3D NAND, access lines, which may also be known as “wordlines,” mayeach operably connect the storage devices corresponding to a respectivetier of the three-dimensional array. In 2D NAND, access lines mayoperably connect storage devices corresponding to a row or column of thetwo-dimensional array. In either 2D or 3D NAND, string drivers may be inoperational communication with the access lines. That is, the stringdrivers drive the access line (e.g., word line) voltages to write to orread from the charge storage devices of the arrays. Each charge storagedevice may be electrically programmed by charging a floating gate of thedevice, and the charging is controlled, at least in part, by operationof the string driver.

String drivers of NAND arrays are operated at high voltages (i.e., atvoltages above 20 V). At high voltages, it may be difficult to provide astring driver that meets desired criteria, such as a high breakdownvoltage (at least 30 V breakdown voltage), relatively low band-to-bandleakage and low impact ionization leakage, sufficiently high drivecurrent, low floating body effects, and associated circuitry that is notoverly complex. Providing string drivers that meet these criteria may beparticularly challenging in 3D NAND arrays, in which large numbers ofstacked tiers also makes scalability of string drivers important.Conventional structures and materials for string drivers often requirelarge dimensions (e.g., long lateral double-diffused offsets (e.g., LDDoffsets of at least about 1.0 micrometers (at least about 1.0 μm)) orincreasingly complex structures or circuitry (e.g., multiple gates perchannel region) to accommodate high-voltage operation. Therefore, thestructures of and materials for string drivers, for high-voltageoperation with non-volatile memory arrays, continue to presentchallenges.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional, elevational, schematic illustration of astring driver according to an embodiment of the present disclosure,wherein a high band gap material occupies a central portion and thestring driver is configured for operational connection to charge storagedevices in a 3D NAND array.

FIG. 2 is a cross-sectional, elevational, schematic illustration of astring driver according to an embodiment of the present disclosure,wherein a high band gap material circumscribes a central portion and thestring driver is configured for operational connection to charge storagedevices in a 3D NAND array.

FIG. 3 is a cross-sectional, elevational, schematic illustration of astring driver according to an embodiment of the present disclosure,wherein multiple high band gap materials circumscribe a central portionand the string driver is configured for operational connection to chargestorage devices in a 3D NAND array.

FIG. 4 is a cross-sectional, elevational, schematic illustration of astring driver according to an embodiment of the present disclosure,wherein a high band gap material forms a horizontal channel region andthe string driver is configured for operational connection to chargestorage devices in an array (e.g., a 2D NAND array or a 3D NAND array).

FIG. 5 is a cross-sectional, elevational, schematic illustration of astring driver according to an embodiment of the present disclosure,wherein a high band gap material and a low band gap material form ahorizontal channel region and the string driver is configured foroperational connection to charge storage devices in an array (e.g., a 2DNAND array or a 3D NAND array).

FIGS. 6 through 11 are cross-sectional, elevational, schematicillustrations during various stages of processing to fabricate thestring driver of FIG. 1.

FIGS. 12 and 13 are cross-sectional, elevational, schematicillustrations during various stages of processing to fabricate thestring driver of FIG. 2, wherein the stages of FIGS. 12 and 13 followthose of FIGS. 6 through 10.

FIGS. 14 through 17 are cross-sectional, elevational, schematicillustrations during various stages of processing to fabricate thestring driver of FIG. 3, wherein the stages of FIGS. 14 through 17follow those of FIGS. 6 through 9.

FIGS. 18 through 20 are cross-sectional, elevational, schematicillustrations during various stages of processing to fabricate thestring driver of FIG. 4.

FIGS. 21 through 24 are cross-sectional, elevational, schematicillustrations during various stages of processing to fabricate thestring driver of FIG. 5.

FIG. 25 is a cross-sectional, top plan, schematic illustration of thestring driver of FIG. 1, taken along section line A-A.

FIG. 26 is a cross-sectional, top plan, schematic illustration of astring driver according to an embodiment of the present disclosure,wherein the string driver includes a plurality of pillars of channelmaterial, such as a plurality of the pillars of channel material of thestring driver of FIG. 1.

FIG. 27 is a cross-sectional, top plan, schematic illustration of thestring driver of FIG. 2, taken along section line B-B.

FIG. 28 is a cross-sectional, top plan, schematic illustration of thestring driver of FIG. 3, taken along section line C-C.

FIG. 29 is a simplified block diagram of a semiconductor deviceincluding an array of charge storage devices and a string driveraccording to an embodiment of the present disclosure.

FIG. 30 is a simplified block diagram of a system implemented accordingto one or more embodiments of the present disclosure.

DETAILED DESCRIPTION

Devices and systems including string drivers and methods of formingrelated structures are disclosed. The string drivers of the devices andsystems include a “high band gap” material in or around the channelregion of the string driver. As used herein, the term “high band gapmaterial” means and includes a material with a greater (e.g., wider)energy band gap than the band gap of polysilicon, i.e., a band gapgreater than about 1.12 eV. The high band gap material may have anenergy band gap of at least about 1.5 eV (e.g., greater than about 1.5eV, e.g., greater than about 3.0 eV, at least about 3.2 eV, at least 3.2eV). The high band gap material may also have high mobility. As usedherein, “high mobility” means and includes a mobility of greater thanabout 5 cm²/V·s (e.g., at least about 10 cm²/V·s, e.g., 10 cm²/V·s toabout 50 cm²/V·s, e.g., greater than about 15 cm²/V·s). Therefore, thehigh band gap material may have a higher mobility than polysilicon(which has a mobility of from about 5 cm²/V·s to about 15 cm²/V·s).

With a high band gap and high mobility material for or around thechannel region, coupled with other features of embodiments of thedisclosed structures, the string drivers may be formed with compact sizeand with accompanying circuitry that is similar or the same incomplexity as conventional accompanying circuitry. For example, a singlegate region may be used and the lateral double-diffused offset regionbetween the channel region and the drain/source region, i.e., a regionoffsetting the drain/source regions from the gate, may be short (e.g.,less than 0.20 micrometers (less than 0.20 μm), e.g., 0 micrometers (0μm) (wherein the channel region may contact the drain/source regions)).With such structures, band-to-band leakage and impact ionization leakagemay be minimized, high breakdown voltage (i.e., a breakdown voltage ofat least about 30 V) may be exhibited, while still achieving sufficientdrive current and reduced floating body effects (e.g., electron holepairs of significantly less than 1000 electron hole pairs, e.g., about10 electron hole pairs). The electric field at gate-drain andgate-source corners may also be reduced, relative to conventional stringdrivers, by using the high band gap material.

As used herein, the term “substrate” means and includes a base materialor other construction upon which components, such as those within memorycells, are formed. The substrate may be a semiconductor substrate, abase semiconductor material on a supporting structure, a metalelectrode, or a semiconductor substrate having one or more materials,structures, or regions formed thereon. The substrate may be aconventional silicon substrate or other bulk substrate including asemiconductive material. As used herein, the term “bulk substrate” meansand includes not only silicon wafers, but also silicon-on-insulator(“SOI”) substrates, such as silicon-on-sapphire (“SOS”) substrates orsilicon-on-glass (“SOG”) substrates, epitaxial layers of silicon on abase semiconductor foundation, or other semiconductor or optoelectronicmaterials, such as silicon-germanium (Si_(1-x)Ge_(x), where x is, forexample, a mole fraction between 0.2 and 0.8), germanium (Ge), galliumarsenide (GaAs), gallium nitride (GaN), or indium phosphide (InP), amongothers. Furthermore, when reference is made to a “substrate” in thefollowing description, previous process stages may have been utilized toform materials, regions, or junctions in the base semiconductorstructure or foundation.

As used herein, the term “precursor,” when referring to a material,region, or structure, means and refers to a material, region, orstructure to be transformed into a resulting material, region, orstructure. For example, and without limitation, a “precursor material”may refer to a material that is to be patterned during formation of afinal region or structure.

As used herein, the term “amorphous,” when referring to a material,means and refers to a material having a substantially noncrystallinestructure.

As used herein, the term “vertical” means and includes a direction thatis perpendicular to the width and length of the respective region.“Vertical” may also mean and include a direction that is perpendicularto a primary surface of the substrate on which a referenced material orstructure is located.

As used herein, the term “horizontal” means and includes a directionthat is parallel to at least one of the width and length of therespective region. “Horizontal” may also mean and include a directionthat is parallel to a primary surface of the substrate on which thereferenced material or structure is located.

As used herein, the term “between” is a spatially relative term used todescribe the relative disposition of one material, region, or sub-regionrelative to at least two other materials, regions, or sub-regions. Theterm “between” may encompass both a disposition of one material, region,or sub-region directly adjacent to the other materials, regions, orsub-regions and a disposition of one material, region, or sub-regionindirectly adjacent to the other materials, regions, or sub-regions.

As used herein, the term “proximate to” is a spatially relative termused to describe disposition of one material, region, or sub-region nearto another material, region, or sub-region. The term “proximate”includes dispositions of indirectly adjacent to, directly adjacent to,and internal to.

As used herein, the term “about,” when preceding a number, refers to thenumber exactly, any number that would round to that number, and othernumbers approximating the number while still been operably effective.Thus, a description of a length of “about 1.0 micrometer” would includea length of 1.0 micrometer exactly, lengths in the range of 0.5micrometers to 1.4 micrometers, as well as other numbers approximating1.0 micrometer that are still operably effective.

As used herein, reference to an element as being “on” or “over” anotherelement means and includes the element being directly on top of,adjacent to (e.g., laterally adjacent to, vertically adjacent to),underneath, or in direct contact with the other element. It alsoincludes the element being indirectly on top of, adjacent to (e.g.,laterally adjacent to, vertically adjacent to), underneath, or near theother element, with other elements present therebetween. In contrast,when an element is referred to as being “directly on” or “directlyadjacent to” another element, there are no intervening elements present.

As used herein, other spatially relative terms, such as “below,”“lower,” “bottom,” “above,” “upper,” “top,” and the like, may be usedfor ease of description to describe one element's or feature'srelationship to another element(s) or feature(s) as illustrated in thefigures. Unless otherwise specified, the spatially relative terms areintended to encompass different orientations of the materials inaddition to the orientation as depicted in the figures. For example, ifmaterials in the figures are inverted, elements described as “below” or“under” or “on bottom of” other elements or features would then beoriented “above” or “on top of” the other elements or features. Thus,the term “below” may encompass both an orientation of above and below,depending on the context in which the term is used, which will beevident to one of ordinary skill in the art. The materials may beotherwise oriented (rotated 90 degrees, inverted, etc.) and thespatially relative descriptors used herein interpreted accordingly.

As used herein, the terms “comprises,” “comprising,” “includes,” and/or“including” specify the presence of stated features, regions, stages,operations, elements, materials, components, and/or groups, but do notpreclude the presence or addition of one or more other features,regions, stages, operations, elements, materials, components, and/orgroups thereof.

As used herein, “and/or” includes any and all combinations of one ormore of the associated listed items.

As used herein, the singular forms “a,” “an,” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise.

The illustrations presented herein are not meant to be actual views ofany particular material, species, structure, device, or system, but aremerely idealized representations that are employed to describeembodiments of the present disclosure.

Embodiments are described herein with reference to cross-sectionalillustrations that are schematic illustrations. Accordingly, variationsfrom the shapes of the illustrations as a result, for example, ofmanufacturing techniques and/or tolerances, are to be expected. Thus,embodiments described herein are not to be construed as limited to theparticular shapes or regions as illustrated but may include deviationsin shapes that result, for example, from manufacturing techniques. Forexample, a region illustrated or described as box-shaped may have roughand/or nonlinear features. Moreover, sharp angles that are illustratedmay be rounded. Thus, the materials, features, and regions illustratedin the figures are schematic in nature and their shapes are not intendedto illustrate the precise shape of a material, feature, or region and donot limit the scope of the present claims.

The following description provides specific details, such as materialtypes and processing conditions, in order to provide a thoroughdescription of embodiments of the disclosed devices and methods.However, a person of ordinary skill in the art will understand that theembodiments of the devices and methods may be practiced withoutemploying these specific details. Indeed, the embodiments of the devicesand methods may be practiced in conjunction with conventionalsemiconductor fabrication techniques employed in the industry.

The fabrication processes described herein do not form a completeprocess flow for processing semiconductor device structures. Theremainder of the process flow is known to those of ordinary skill in theart. Accordingly, only the methods and semiconductor device structuresnecessary to understand embodiments of the present devices and methodsare described herein.

Unless the context indicates otherwise, the materials described hereinmay be formed by any suitable technique including, but not limited to,spin coating, blanket coating, chemical vapor deposition (“CVD”), atomiclayer deposition (“ALD”), plasma enhanced ALD, physical vapor deposition(“PVD”) (e.g., sputtering), or epitaxial growth. Depending on thespecific material to be formed, the technique for depositing or growingthe material may be selected by a person of ordinary skill in the art.

Unless the context indicates otherwise, the removal of materialsdescribed herein may be accomplished by any suitable techniqueincluding, but not limited to, etching, ion milling, abrasiveplanarization, or other known methods.

Reference will now be made to the drawings, where like numerals refer tolike components throughout. The drawings are not necessarily drawn toscale.

FIG. 1 illustrates an embodiment of a string driver 100 according to thepresent disclosure, which string driver 100 is configured forhigh-voltage operation and is in operable communication with athree-dimensional array of charge storage devices (e.g., non-volatilememory devices, e.g., NAND flash memory cells). The string driver 100may be above, below, or laterally adjacent to charge storage devices ofan array (not shown in FIG. 1).

The string driver 100 includes a pillar portion 110 extendingvertically, relative to a primary surface 102 of a substrate 101,between a pair of electrodes 112, one of which being a source electrodeand the other being a drain electrode. The pillar portion 110 includes achannel region 120 between drain/source regions 122 that are each offsetfrom the channel region 120 by an offset region 124 (e.g., a lateraldouble-diffused (LDD) offset).

The pillar portion 110 includes a high band gap material 130 in or nearthe channel region 120 (e.g., in the channel region 120, in the offsetregions 124, and/or in the drain/source regions 122). The high band gapmaterial 130 of the pillar portion 110 may be, in whole or in part,crystalline (e.g., monocrystalline) or amorphous.

The high band gap material 130 in the channel region 120 may be anundoped high band gap material 131, which may comprise, consistessentially of, or consist of one or more of zinc oxide, indium galliumzinc oxide, indium zinc oxide, silicon carbide, tin oxide, or galliumarsenide. The indium gallium zinc oxide may be in amorphous form. Therelative stoichiometries of the elements of the foregoing compounds maybe other than one. Thus, the high band gap material 130 may be asemiconductor material having an energy band gap of greater than 1.12 eV(e.g., at least about 1.5 eV (e.g., greater than about 1.5 eV, e.g.,greater than about 3.0 eV, at least about 3.2 eV, at least 3.2 eV)).

The high band gap material 130 in the drain/source regions 122 may be adoped high band gap material 132, which comprises the same material asthe undoped high band gap material 131 with the addition of at least onedopant. The at least one dopant may be an n-type dopant selected fromthe group consisting of aluminum (Al) and silicon (Si). The at least onedopant may not comprise phosphorous (P) or arsenic (As). Thus, thedrain/source regions 122 are defined by the presence of the doped highband gap material 132.

Between the undoped high band gap material 131 of the channel region 120and the doped high band gap material 132, the high band gap material 130may include less doping (i.e., a “less-doped high band gap material”134) and define the offset regions 124. For example, while the dopedhigh band gap material 132 may include a dopant concentration of about1×10¹⁸ at/cm³ to about 1×10²¹ at/cm³, the “less-doped” high band gapmaterial may include a lower dopant concentration of less than about1×10¹⁷ at/cm³. The offset regions 124 may include a gradient of the atleast one dopant, with a higher dopant concentration adjacent thedrain/source regions 122 and a lesser dopant concentration adjacent thechannel region 120. Therefore, a boundary between the offset regions 124and each of the channel region 120 and the drain/source regions 122 maynot necessarily be along a straight line.

A dielectric material 140 circumscribes the pillar portion 110,surrounding a sidewall of the high band gap material 130. The dielectricmaterial 140 spaces the high band gap material 130 from a gate region150 that is adjacent the channel region 120. Thus, the high band gapmaterial 130 may be on (e.g., adjacent, directly adjacent, in directphysical contact with) the dielectric material 140. The dielectricmaterial 140 may comprise at least one electrically insulative material,e.g., an oxide (e.g., silicon dioxide (SiO₂)).

The gate region 150 may comprise a conductive material (e.g., aconductive metal (e.g., tungsten (W)) and may extend a height of thechannel region 120 and partially along a height of each of the offsetregions 124. Though the gate region 150 is illustrated to have anexternal sidewall 152 just wider than a width of the illustratedelectrodes 112, the external sidewall 152 may be much further away fromthe pillar portion 110, e.g., it may extend to another of the pillarportions 110 of the string driver 100, as further discussed below.

Because the high band gap material 130 is used in the pillar portion110, in or about the channel region 120, the offset regions 124 may eachbe short, i.e., less than 0.20 micrometers (less than 0.20 μm) (e.g.,about 0.1 μm to about 0.15 μm; or about 0 μm), without incurringdetrimental band-to-band leakage, impact ionization leakage, electricalfields at the gate-drain and gate-source corners, and floating bodyeffects when operating the string driver 100 at a high voltage (e.g., avoltage of at least 20 V). The shorter offset region 124 also lowers theresistance in the pillar portion 110, as compared to using a non-highband gap material such as silicon or polysilicon, which enables asufficient drive current through the string driver 100 during operationthereof to communicate with an array of charge storage devices.

Further, the high band gap material 130 in or around the channel region120 enables operation of the string driver 100 at high voltage even withonly a single gate region (e.g., the gate region 150) adjacent thechannel region 120. Inclusion of only a single gate region 150 perpillar portion 110 enables the string driver 100 to be operable withaccompanying circuitry that is less complex than the circuitry that mayaccompany a string driver having multiple gates along a channel region.The single gate as well as the short length of the offset regions 124also enable formation of the pillar portion 110, and therefore theremainder of the string driver 100, at a compact size, compared to astring driver having multiple gate regions along a channel region and/orlong offset regions (e.g., lateral double-diffused offsets of about 1.0μm or more). With a compact size and non-complex accompanying circuitry,the string driver 100 is conducive for inclusion in 3D NAND arrays witha large number of tiers (e.g., greater than 100 tiers, e.g., between 100tiers and about 200 tiers), with each tier providing at least onehorizontal array of charge storage devices. In some embodiments, thestring driver 100 may be disposed laterally adjacent to a stack of thetiers.

With continued reference to FIG. 1, the high band gap material 130 ofthe string driver 100 may occupy a central portion of the pillar portion110. For example, the high band gap material 130 may fill, orsubstantially fill, the area between the dielectric material 140.

With reference to FIG. 2, a string driver 200 may include anotherdielectric material 260 occupying a central portion of a pillar portion210. A channel region 220, drain/source regions 222, and offset regions224 may circumscribe the other dielectric material 260. As with thestring driver 100 of FIG. 1, the string driver 200 may include thedielectric material 140 around the channel region 220, the drain/sourceregions 222, and the offset regions 224. The other dielectric material260 may comprise, consist essentially of, or consist of an electricallyinsulative material (e.g., an oxide (e.g., silicon dioxide (SiO₂)),air), which may be the same as or different than the dielectric material140. Again, a single gate (e.g., the gate region 150) may be includedwhile still enabling the string driver 200 to be operable at highvoltage, for a 3D NAND array, with the above-discussed advantages.

With reference to FIG. 3, a string driver 300 may include a plurality ofhigh band gap materials in a pillar portion 310. For example, the stringdriver 300 may include an outer sub-region of a high band gap material330 (including undoped high band gap material 331 in a channel region320, doped high band gap material 332 in drain/source regions 322, andless-doped high band gap material 334 in offset regions 324) and aninner sub-region of another high band gap material 330′ (includingundoped other high band gap material 331′ in the channel region 320,doped other high band gap material 332′ in the drain/source regions 322,and less-doped other high band gap material 334′ in offset regions 324).Each of the high band gap material 330 and the other high band gapmaterial 330′ may be selected from the group consisting of zinc oxide,indium gallium zinc oxide, indium zinc oxide, silicon carbide, tinoxide, and gallium arsenide.

For example, the high band gap material 330 of the outer sub-region maycomprise, consist essentially of, or consist of one of the previouslymentioned oxides while the other high band gap material 330′ may be adifferent high band gap material (i.e., a high band gap material of adifferent oxide or also the same oxide but with a differentstoichiometry (e.g., different atomic ratios of elements)) than that ofthe high band gap material 330, or a non-oxide material. The high bandgap material 330 of the outer sub-region may comprise, consistessentially of, or consist of an oxide while the other high band gapmaterial 330′ of the inner sub-region may comprise, consist essentiallyof, or consist of another, different oxide. Both the high band gapmaterial 330 and the other high band gap material 330′ may comprise,consist essentially of, or consist of an oxide, with a lower oxygencontent in the oxide of the high band gap material 330 of the outersub-region as compared to the oxide of the high band gap material 330′of the inner sub-region. The high band gap material 330 of the outersub-region may comprise, consist essentially of, or consist of an oxidewhile the other high band gap material 330′ of the inner sub-region maycomprise, consist essentially of, or consist of a different oxide.

The use of more than one high band gap material may enable improvedreliability, lessened leakage, and improved mobility as compared tostructures including only one high band gap material.

Each sub-region (e.g., film) of the plurality of the high band gapmaterial 330, 330′ may be thin (e.g., defining a thickness of a fewnanometers (i.e., 3 nanometers (3 nm)) up to tens of nanometers (i.e.,between 10 nanometers (10 nm) and 100 nanometers (100 nm)). The highband gap material 330 and the other high band gap material 330′ maydefine the same or different thicknesses.

The electrodes above and below the pillar portion 310, i.e.,source/drain electrodes 312 may include a sidewall contact extensionportion 314 that extends into the pillar portion 310. The increasedcontact between the conductive material of the electrodes 312 and theother high band gap material 330′ promotes electrical communication,enabling improved contact resistance than would be achievable withoutthe sidewall contact extension portions 314. The sidewall contactextension portions 314 may extend past the upper/lower ends of the gateregion 150. The other dielectric material 260 may occupy the remainingportion of the pillar portion 310 between the sidewall contact extensionportions 314 of the electrodes 312.

Each of the string drivers 100, 200, 300 of FIGS. 1 through 3 areconfigured for high-voltage operation and in operative communicationwith three-dimensional arrays of charge storage devices (e.g.,three-dimensional non-volatile memory arrays, e.g., 3D NAND) with theadvantages discussed above with respect to the string driver 100 ofFIG. 1. The string drivers 100, 200, 300 may be laterally disposedrelative to a stack of tiers (e.g., more than 100 tiers) of the 3D NANDarray. In other embodiments, the string drivers 100, 200, 300 may bedisposed above or below such stack of tiers.

High band gap materials are also conducive for use in high-voltagestring drivers for not only three-dimensional arrays of charge storagedevices (e.g., three-dimensional non-volatile memory arrays, e.g., 3DNAND), but are also conducive for use in high-voltage string drivers fortwo-dimensional arrays of charge storage devices (e.g., two-dimensionalnon-volatile memory arrays, e.g., 2D NAND). Such string drivers may bedisposed laterally adjacent a horizontal array of charge storage devicesor may be disposed above or below the horizontal array. With referenceto FIG. 4, illustrated is a string driver 400 that may be conducive foruse in either such two-dimensional or three-dimensional arrays. Thestring driver 400 may include a gate region 450 isolated from a highband gap material 430 by a dielectric material 440. The dielectricmaterial 440 may surround the gate region 450 above, below, and to thesides thereof. Thus, the gate region 450 may be a “floating gate.”Another dielectric material 460 is below the high band gap material 430.The high band gap material 430 may comprise, consist essentially of, orconsist of any of the materials discussed above with regard to the highband gap material 130, 330 of FIGS. 1 through 3. The dielectric material440 and the other dielectric material 460 may comprise, consistessentially of, or consist of any of the materials discussed above withregard to the dielectric material 140 and the other dielectric material260 of FIGS. 1 through 3. The gate region 450 may comprise, consistessentially of, or consist of any of the conductive materials discussedabove with regard to the gate region 150 of FIGS. 1 through 3.

A central portion of the high band gap material 430 may be an undopedhigh band gap material 431 forming a channel region 420 adjacent (e.g.,underneath) the gate region 450. Distal portions of the high band gapmaterial 430 may be doped high band gap material 432 to providedrain/source regions 422. The dopants may comprise, consist essentiallyof, or consist of any of the dopants discussed above with regard to thedoped high band gap material 132, 332 of FIGS. 1 through 3. The highband gap material 430 between the channel region 420 and thedrain/source regions 422 may be a less-doped high band gap material 434forming offset regions 424. As with the string drivers 100, 200, 300 ofFIGS. 1 through 3, the offset regions 424 may be short (e.g., less than0.20 micrometers (less than 0.20 μm) (e.g., about 0 μm)); yet, with thehigh band gap material 430 in or around the channel region 420, thestring driver 400 may be conducive for high-voltage operation in atwo-dimensional charge storage device array (e.g., a 2D NAND array) orin a three-dimensional charge storage device array (e.g., a 3D NANDarray) without detrimental leakage and with sufficient current drive.

With reference to FIG. 5, a string driver 500 may, alternatively,include a low band gap material 530 (e.g., an undoped low band gapmaterial 531) in a channel region 520. As used herein, the term “lowband gap material” means and includes a material with an energy band gapabout equal to or less than that of polysilicon (i.e., a band gap ofabout 1.12 eV or less). The low band gap material 530 may comprise,consist essentially of, or consist of at least one of germanium (Ge),silicon germanium (SiGe), or indium gallium arsenic (InGaAs).

Inclusion of the low band gap material 530 in the channel region 520between the doped high band gap material 432 of the drain/source regions422 and the less-doped high band gap material 434 of the offset regions424 may further enhance current drive through the channel region 520.Therefore, the string driver 500 may be conducive for high-voltageoperation in a two-dimensional charge storage device array (e.g., a 2DNAND array) or in a three-dimensional charge storage device array (e.g.,a 3D NAND array) without detrimental leakage and with sufficient currentdrive.

While the string drivers 100, 200, 300, 400, 500 of FIGS. 1 through 5include at least one dopant in the high band gap material of thedrain/source regions and in the high band gap material of the offsetregions, in other embodiments, the high band gap material may be free ofthe at least one dopant. In such embodiments, contact between theconductive material of the electrodes and the high band gap material ofthe drain/source regions may be sufficient to form Ohmic contacts. Thus,the drain/source regions 122 (FIG. 1), 222 (FIG. 2), 322 (FIG. 3), 422(FIG. 4 and FIG. 5) and the offset regions 124 (FIG. 1), 224 (FIG. 2),324 (FIG. 3), 424 (FIG. 4 and FIG. 5) may each consist essentially ofthe undoped high band gap material 131 (FIG. 1 and FIG. 2), 331 (FIG.3), 431 (FIG. 4), 531 (FIG. 5), rather than the doped high band gapmaterial 132 (FIG. 1 and FIG. 2), 332/332′ (FIG. 3), 432 (FIG. 4 andFIG. 5) and the less-doped high band gap material 134 (FIG. 1 and FIG.2), 334/334′ (FIG. 3), 434 (FIG. 4 and FIG. 5), respectively.

Accordingly, disclosed is a device comprising a string driver. Thestring driver comprises a channel region between a drain region and asource region. At least one of the channel region, the drain region, andthe source region comprises a high band gap material. A gate region isadjacent and spaced from the high band gap material.

With reference to FIGS. 6 through 11, illustrated are various stages ina method of fabricating the string driver 100 of FIG. 1. A conductivematerial 612 may be formed on the primary surface 102 of a substrate 101and patterned to provide a lower electrode of the electrodes 112 ofFIG. 1. The conductive material 612 may comprise, consist essentiallyof, or consist of a conductive metal. A first portion of a dielectricmaterial 662 (e.g., an oxide (e.g., silicon dioxide (SiO₂)), a nitride(e.g., silicon nitride (SiN)) may be formed adjacent the conductivematerial 612. Techniques for forming a region of the conductive material612 disposed within the first portion of the dielectric material 662will be evident to one of ordinary skill in the art and so are notdiscussed in detail herein.

In some embodiments, the conductive material 612 may be doped with atleast one dopant 633, as indicated by arrows D. The at least one dopantmay be the above-discussed n-type dopant selected from the groupconsisting of aluminum (Al) and silicon (Si) to later be included in thedoped high band gap material 132 of FIG. 1. Alternatively, as inembodiments in which the string driver to be fabricated includes nodopant in drain/source regions 122 (FIG. 1), then the doping act of FIG.6 may be skipped. Accordingly, the amount of the at least one dopant 633represented by arrows D may be zero (for forming the drain/sourceregions 122 (FIG. 1) without the at least one dopant 633) or may begreater than zero (for forming the drain/source regions 122 (FIG. 1)with the at least one dopant 633).

A second portion of a dielectric material 662′ may be formed over theconductive material 612 and, if included, over the at least one dopant633. The second portion of the dielectric material 662′ may comprise,consist essentially of, or consist of the same or a different dielectricmaterial as the first portion of the dielectric material 662.

A conductive material 650 may be formed over the second portion of thedielectric material 662′. The conductive material 650 may be theconductive material described above with regard to the gate region 150of FIG. 1. The conductive material 650 may be formed to provide a regionwithin a third portion of a dielectric material 662″. The third portionof the dielectric material 662″ may comprise, consist essentially of, orconsist of the same or a different dielectric material as either or bothof the first and second portions of the dielectric material 662, 662′.Techniques for forming a region of the conductive material 650 disposedwithin the third portion of the dielectric material 662″ will be evidentto one of ordinary skill in the art and so are not discussed in detailherein.

A fourth portion of a dielectric material 662′″ may be formed over theconductive material 650 and over the third portion of the dielectricmaterial 662″. The fourth portion of the dielectric material 662′″ maycomprise, consist essentially of, or consist of the same or a differentdielectric material as any or all of the first, second, and thirdportions of the dielectric material 662, 662′, 662″.

With reference to FIG. 8, an opening 840 may be formed through theconductive material 650 and through each of the second, third, andfourth portions of the dielectric material 662′, 662″, 662′″ and filledwith the dielectric material 140 discussed above with respect to FIG. 1.The opening 840 may be formed, e.g., by etching, to expose an uppersurface of the conductive material 612, which portion of upper surfacemay include the at least one dopant 633 if the doping act of FIG. 6 wasnot skipped. Therefore, the dielectric material 140 may be in physicalcontact with the conductive material 612.

With reference to FIG. 9, another opening 940 may be formed, e.g., byetching, through the dielectric material 140 to expose a portion of theconductive material 612, but not exposing the conductive material 650.In embodiments in which the doping act of FIG. 6 was carried out, theexposed portion of the conductive material 612 may be a portionincluding the at least one dopant 633.

With reference to FIG. 10, the other opening 940 may be filled with thehigh band gap material 130. In embodiments in which the string driver100 (FIG. 1) includes the at least one dopant 633 in the drain/sourceregions 122 and in the offset regions 124 (FIG. 1), then, after fillingthe other opening 940 with the high band gap material 130, an additionalamount of the at least one dopant 633 may be implanted into the uppersurface of the high band gap material 130, as indicated by arrows E ofFIG. 11. Before, simultaneously, or afterwards, a thermal treatment maybe performed to cause the at least one dopant 633 to diffuse from theconductive material 612 into a lower portion of the high band gapmaterial 130, as indicated by arrows F. Thus, the doped high band gapmaterial 132 of the upper portion of the drain/source regions 122(FIG. 1) is formed by the implantation (arrows E), and the doped highband gap material 132 of the lower portion of the drain/source regions122 (FIG. 1) is formed by the thermal treatment (arrows F). Otherwise,in embodiments in which the string driver does not include the at leastone dopant 633 in the drain/source regions 122 or in the offset regions124 (FIG. 1), then, after filling the other opening 940 with the highband gap material 130, no additional dopant is added and no thermaltreatment may be performed. Accordingly, the amount of the additionalamount of the at least one dopant 633 represented by arrows E may bezero (for forming the drain/source regions 122 (FIG. 1) without the atleast one dopant 633) or may be greater than zero (for forming thedrain/source regions 122 (FIG. 1) with the at least one dopant 633).Additional conductive material to form the upper portion of thesource/drain electrodes 112 may then be formed over the high band gapmaterial 130, to form the string driver 100 of FIG. 1.

With reference to FIGS. 12 and 13, illustrated are various stages of amethod of forming the string driver 200 of FIG. 2.

The stage of FIG. 12 may follow the stages illustrated in FIGS. 6through 10. After forming the high band gap material 130 in the opening940 (FIG. 10) another opening 1240 may be formed through the high bandgap material 130 to expose a portion of the conductive material 612. Theexposed portion of the conductive material 612 may be doped with the atleast one dopant 633, in embodiments in which the string driver 200(FIG. 2) has drain/source regions 222 and offset regions 224 thatinclude the at least one dopant 633.

With reference to FIG. 13, the other opening 1240 may then be filledwith the other dielectric material 260, discussed above with regard toFIG. 2. In embodiments in which the string driver 200 (FIG. 2) includesthe at least one dopant 633, an additional amount of the at least onedopant 633 may be implanted into the upper surface of the high band gapmaterial 130, as indicated by arrows E′, to form the doped high band gapmaterial 132 of the upper portion of the drain/source regions 222 ofFIG. 2. A thermal treatment may cause the at least one dopant 633 todiffuse into a lower portion of the high band gap material 130, asindicated by arrows F′, to form the doped high band gap material 132 ofthe lower portion of the drain/source regions 222 of FIG. 2. The thermaltreatment (arrows F′) may precede, be concurrent to, or follow theadditional implantation (arrows E′). Filling the other opening 1240 withthe other dielectric material 260 may precede or follow both or eitherof the additional implantation (arrows E′) and the thermal treatment(arrows F′). Otherwise, in embodiments in which the string driver doesnot include the at least one dopant 633, no additional doping (arrowsE′) or thermal treatment may be performed. Accordingly, the amount ofthe additional amount of the at least one dopant 633 represented byarrows E′ may be zero (for forming the drain/source regions 222 (FIG. 2)without the at least one dopant 633) or may be greater than zero (forforming the drain/source regions 222 (FIG. 2) with the at least onedopant 633). The upper portion of the electrodes 112 (FIG. 2) may thenbe formed over the dielectric material 140, the high band gap material130, and the other dielectric material 260 to form the string driver 200of FIG. 2.

Alternatively, in some embodiments, the stage illustrated in FIG. 12 mayfollow that of FIG. 9, wherein the high band gap material 130 may beformed by depositing the high band gap material 130 along the interiorsidewalls of the dielectric material 140, leaving a central portion ofthe opening 940 of FIG. 9 open to form the other opening 1240. The otheropening 1240 may then be filled with the other dielectric material 260in the stage of FIG. 13.

With reference to FIGS. 14 through 17, illustrated are various stages ina method of forming the string driver 300 of FIG. 3. The stage of FIG.14 may be preceded by the stages of FIGS. 6 through 9. After forming theopening 940 of FIG. 9, the high band gap material 330 of the outersub-region may be formed (e.g., conformally deposited) on the dielectricmaterial 140, and the other high band gap material 330′ of the innersub-region may be formed (e.g., conformally deposited) on the material330 of the outer sub-region. A central portion may remain open, forminganother opening 1440.

With reference to FIG. 15, in embodiments in which the string driver 300(FIG. 3) includes the at least one dopant 633, an additional amount ofthe at least one dopant 633 may be implanted into an upper portion ofboth of the high band gap materials 330, 330′, as indicated by arrowsE′, to form the doped high band gap material 332, 332′ of the upperportion of the drain/source regions 322 of FIG. 3. Before, simultaneouswith, or after the implantation (arrows E′), a thermal treatment maycause the at least one dopant 633 to diffuse from the conductivematerial 612 into a lower portion of the high band gap materials 330,330′, as indicated by arrows F′, to form the doped high band gapmaterial 332, 332′ of the lower portion of the drain/source regions 322of FIG. 3. Otherwise, in embodiments in which the string driver 300(FIG. 3) does not include the at least one dopant 633, no additionaldoping (arrows E′) or thermal treatment may be performed. Accordingly,the amount of the additional amount of the at least one dopant 633represented by arrows E′ may be zero (for forming the drain/sourceregions 322 (FIG. 3) without the at least one dopant 633) or may begreater than zero (for forming the drain/source regions 322 (FIG. 3)with the at least one dopant 633).

With reference to FIG. 16, an additional amount of conductive material612′ (e.g., the conductive material 612) may be formed (e.g., deposited)in the other opening 1440 (FIG. 15), to form a partially filled opening1640. The conductive material 612′ may be the same as, or differentthan, the conductive material 612 of the remainder of the lower portionof the source/drain electrodes 312 (FIG. 3).

With reference to FIG. 17, the other dielectric material 260 may beformed (e.g., deposited) over the additional amount of the conductivematerial 612′, and another amount of the conductive material 612″ formed(e.g., deposited) over the other dielectric material 260 to form theupper portion of the sidewall contact extension portions 314 of theupper portion of the source/drain electrodes 312 (FIG. 3). The otheramount of the conductive material 612″ may the same as or different thanthe conductive material 612 and the additional amount of the conductivematerial 612′.

In forming the other dielectric material 260 within the partially filledopening 1640, the other dielectric material 260 may be formed to notfill the opening 1640. Alternatively, the other dielectric material 260may be formed to fill the opening 1640 and then a portion removed (e.g.,etched) to recess an upper surface of the dielectric material 260relative to an upper surface of the fourth portion of the dielectricmaterial 662′″.

The other amount of the conductive material 612″ may be formed to fillthe remainder of the opening 1640 and to extend above the upper surfaceof the fourth portion of the dielectric material 662′″ and thenpatterned (e.g., etched) to form the upper portion of the source/drainelectrodes 312 (FIG. 3), with the sidewall contact extension portion 314extending into the pillar portion 310.

With reference to FIGS. 18 to 20, illustrated are various stages in amethod of forming the string driver 400 of FIG. 4. A precursor structure1800 may be formed by forming the other dielectric material 460 over thesubstrate 101 (e.g., on the primary surface 102 of the substrate 101),forming the high band gap material 430 (which, at this stage, mayconsist of the undoped high band gap material 431 (FIG. 4)) over theother dielectric material 460, forming the dielectric material 440 overthe high band gap material 430, and forming the conductive material 650over the dielectric material 440.

With reference to FIG. 19, the precursor structure 1800 may then bepatterned (e.g., etched) to the high band gap material 430 to define thegate region 450 of the conductive material 650 and a region of thedielectric material 440 spacing the conductive material 650 from thehigh band gap material 430.

In embodiments in which the string driver 400 (FIG. 4) includes the atleast one dopant 633, implantation may be performed (FIG. 19) to implantthe at least one dopant 633 (FIG. 20) into the exposed portions of thehigh band gap material 430, as indicated by arrows D, to form thedrain/source regions 422 of the doped high band gap material 432 offset,by the offset regions 424 of less-doped high band gap material 434, fromthe channel region 420 of the undoped high band gap material 431.Otherwise, in embodiments in which the string driver 400 (FIG. 4) doesnot include the at least one dopant 633, no implantation (arrows D) maybe performed. Accordingly, the amount of the at least one dopant 633represented by arrows D may be zero (for forming the drain/sourceregions 422 (FIG. 4) without the at least one dopant 633) or may begreater than zero (for forming the drain/source regions 422 (FIG. 4)with the at least one dopant 633). Another amount of the dielectricmaterial 440′ may then be formed about the gate region 450.

With reference to FIGS. 21 to 24, illustrated are various stages in amethod of forming the string driver 500 of FIG. 5. As with the method ofFIGS. 18 to 20, the other dielectric material 460 is formed over thesubstrate 101, and the high band gap material 430 is formed over theother dielectric material 460. The low band gap material 530 is alsoformed over the dielectric material 460. At this stage, the high bandgap material 430 may be the undoped high band gap material 431, and thelow band gap material 530 may also be undoped.

The low band gap material 530 may be formed, patterned (e.g., etched)and then the high band gap material 430 formed around the low band gapmaterial 530 and planarized to form a precursor structure 2100 with thelow band gap material 530 inlaid in the high band gap material 430.Alternatively, the high band gap material 430 may be formed over theother dielectric material 460 in the same manner as FIG. 18, thenpatterned to form an opening that is then filled with the low band gapmaterial 530 and planarized to form the precursor structure 2100 withthe low band gap material 530 inlaid in the high band gap material 430.

The dielectric material 440 and then the conductive material 650 may beformed, consecutively, over the precursor structure 2100 of FIG. 21 toform a precursor structure 2200 of FIG. 22. The precursor structure 2200may then be patterned (e.g., etched) to expose portions of the high bandgap material 430 where the drain/source regions 422 (FIG. 5) are to beformed. In embodiments in which the string driver 500 (FIG. 5) includesthe at least one dopant 633, the at least one dopant 633 (FIG. 24) maythen be implanted into the high band gap material 430, as indicated byarrows D of FIG. 23. During the implantation, the low band gap material530 may not be exposed; rather, it may remain covered by the remainingportion of the dielectric material 440 and the gate region 450 of theconductive material 650. The implantation (arrows D) forms thedrain/source regions 422 of the doped high band gap material 432 offsetfrom the channel region 520 of the low band gap material 530 (undoped)by the offset regions 424 of the less-doped high band gap material 434.Otherwise, in embodiments in which the string driver 500 (FIG. 5) doesnot include the at least one dopant 633, no implantation (arrows D) maybe performed. Accordingly, the amount of the at least one dopant 633represented by arrows D may be zero (for forming the drain/sourceregions 422 (FIG. 5) without the at least one dopant 633) or may begreater than zero (for forming the drain/source regions 422 (FIG. 5)with the at least one dopant 633). The other amount of the dielectricmaterial 440′ may then be formed about the gate region 450.

In forming the high band gap material 430 (FIGS. 18 and 21), alow-temperature (e.g., less than about 400° C.) deposition process maybe used. Such deposition process may include one or more of atomic layerdeposition (ALD), and chemical vapor deposition (CVD), for example andwithout limitation. Therefore, the high band gap material 430 may beformed without thermally degrading previously formed materials andstructures.

Accordingly, disclosed is a method of forming a string driver. Themethod comprises forming a high band gap material. A dielectric materialis formed adjacent the high band gap material. A region of a conductivematerial is formed adjacent the dielectric material. The region of theconductive material is spaced from the high band gap material by atleast the dielectric material.

With reference to FIG. 25, illustrated is a top plan, cross-sectional,schematic illustration of the string driver 100 of FIG. 1, taken alongsection line A-A. The pillar portion 110 (FIG. 1) may define a round(e.g., circular) horizontal cross-sectional area. The gate region 150may also define a round horizontal cross-sectional area, with aperipheral edge evenly distributed about the center of the pillarportion 110 (FIG. 1). However, as illustrated in FIG. 25, the horizontalcross-sectional shape of the gate region 150 may have an alternativeshape (e.g., non-curved, non-round, non-circular).

For example, and without limitation, a gate region 150′ may extend aboutmore than one pillar portion 110 (FIG. 1) of the high band gap material130, as illustrated in FIG. 26. Thus, more than one channel region 120(FIG. 1) of the high band gap material 130 (and, therefore, more thanone pair of the drain/source regions 122 (FIG. 1)) may be associatedwith one gate region 150′ structure. The inclusion of a plurality of thepillar portions 110 (FIG. 1) of the high band gap material 130 mayenhance the current drive of the string driver during operation.

FIGS. 27 and 28 are top plan, cross-sectional, schematic illustrationsof the string driver 200 of FIG. 2, taken along section line B-B, and ofthe string driver 300 of FIG. 3, taken along section line C-C,respectively. Again, the gate region 150 of either structure 200, 300may extend laterally beyond what is illustrated in FIG. 2 or 3.

With reference to FIG. 29, illustrated is a simplified block diagram ofa semiconductor device 2900 implemented according to one or moreembodiments described herein. The semiconductor device 2900 includes anarray 2902 of a plurality of charge storage devices 2914 (e.g.,non-volatile memory devices), which array 2902 may be, for example andwithout limitation, a two-dimensional array of non-volatile memorydevices (e.g., 2D NAND) or a three-dimensional array of non-volatilememory devices (e.g., 3D NAND). The semiconductor device 2900 furtherincludes a control logic component 2904 in operable communication withat least some of the charge storage devices 2914 via data lines 2905. Astring driver 2906 is in operable communication with at least some ofthe charge storage devices 2914 of the array 2902 via access lines 2907(e.g., wordlines). The string driver 2906 may include any of the stringdrivers 100, 200, 300, 400, and 500 (FIGS. 1 through 5, respectively),formed by any of the aforementioned, associated methods. The controllogic component 2904 may be configured to operably interact with thearray 2902 so as to read from or write to any or all charge storagedevices 2914, while the string driver 2906 may be configured to operablyinteract with the array 2902 by driving current to the access lines 2907during the reading from or writing to of the charge storage devices2914.

Accordingly, disclosed is a device comprising an array of charge storagedevices. The device also comprises access lines in operablecommunication with the array of charge storage devices. A string driveris in operable communication with at least one access line of the accesslines. The string driver comprises a drain region and a source regioncomprising a high band gap material. The string driver also comprises atleast one channel region comprising the high band gap material or a lowband gap material. The at least one channel region extends between thedrain region and the source region.

With reference to FIG. 30, depicted is a non-volatile memory system(e.g., a processor-based system) 3000. The system 3000 may includevarious electronic devices manufactured in accordance with embodimentsof the present disclosure. The system 3000 may be any of a variety oftypes such as a computer, pager, cellular phone, personal organizer,control circuit, or other electronic device. The system 3000 may includeone or more processors 3002, such as a microprocessor, to control theprocessing of system functions and requests in the system 3000. Theprocessor 3002 and other subcomponents of the system 3000 may includecharge storage device arrays in operable communication with stringdrivers manufactured in accordance with embodiments of the presentdisclosure.

The system 3000 may include a power supply 3004 in operablecommunication with the processor 3002. For example, if the system 3000is a portable system, the power supply 3004 may include one or more of afuel cell, a power scavenging device, permanent batteries, replaceablebatteries, and rechargeable batteries. The power supply 3004 may alsoinclude an AC adapter; therefore, the system 3000 may be plugged into awall outlet, for example. The power supply 3004 may also include a DCadapter such that the system 3000 may be plugged into a vehiclecigarette lighter or a vehicle power port, for example.

Various other devices may be coupled to the processor 3002 depending onthe functions that the system 3000 performs. For example, a userinterface 3006 may be coupled to the processor 3002. The user interface3006 may include input devices such as buttons, switches, a keyboard, alight pen, a mouse, a digitizer and stylus, a touch screen, a voicerecognition system, a microphone, or a combination thereof. A display3008 may also be coupled to the processor 3002. The display 3008 mayinclude an LCD display, an SED display, a CRT display, a DLP display, aplasma display, an OLED display, an LED display, a three-dimensionalprojection, an audio display, or a combination thereof. Furthermore, anRF sub-system/baseband processor 3010 may also be coupled to theprocessor 3002. The RF sub-system/baseband processor 3010 may include anantenna that is coupled to an RF receiver and to an RF transmitter (notshown). A communication port 3012, or more than one communication port3012, may also be coupled to the processor 3002. The communication port3012 may be adapted to be coupled to one or more peripheral devices3014, such as a modem, a printer, a computer, a scanner, or a camera, orto a network, such as a local area network, remote area network,intranet, or the Internet, for example.

The processor 3002 may control the system 3000 by implementing softwareprograms stored in the memory. The software programs may include anoperating system, database software, drafting software, word processingsoftware, media editing software, or media playing software, forexample. The memory is operably coupled to the processor 3002 to storeand facilitate execution of various programs. For example, the processor3002 may be coupled to system memory 3016, which may include an array ofcharge storage devices (e.g., 2D NAND or 3D NAND) in operablecommunication with a string driver including, e.g., any of the stringdrivers 100, 200, 300, 400, and 500 of FIGS. 1 to 5, respectively.Alternatively, or additionally, the system memory 3016 may includedynamic random access memory (DRAM), static random access memory (SRAM),magnetic random access memory (MRAM), racetrack memory, and other knownmemory types. The system memory 3016 may include volatile memory,non-volatile memory, or a combination thereof. The system memory 3016 istypically large so that it may store dynamically loaded applications anddata.

The processor 3002 may also be coupled to non-volatile memory 3018,which is not to suggest that system memory 3016 is necessarily volatile.The non-volatile memory 3018 may include one or more of read-only memory(ROM) such as an EPROM, resistive read-only memory (RROM), and flashmemory (e.g., 2D NAND or 3D NAND) in operable communication with astring driver (e.g., having any of the string drivers 100, 200, 300,400, 500 of FIGS. 1 to 5, respectively) and to be used in conjunctionwith the system memory 3016. The size of the non-volatile memory 3018 istypically selected to be just large enough to store any necessaryoperating system, application programs, and fixed data. Additionally,the non-volatile memory 3018 may include a high capacity memory such asdisk drive memory, such as a hybrid-drive including resistive memory orother types of non-volatile solid-state memory, for example.

Accordingly, disclosed is a system comprising an array of non-volatilememory devices. At least one string driver is in operable communicationwith the array. The string driver comprises a high band gap material. Atleast one peripheral device is in operable communication with the arrayof non-volatile memory devices. The at least one peripheral devicecomprises circuitry in operable communication with the at least onestring driver.

While the disclosed device structures and methods are susceptible tovarious modifications and alternative forms in implementation thereof,specific embodiments have been shown by way of example in the drawingsand have been described in detail herein. However, it should beunderstood that the present invention is not intended to be limited tothe particular forms disclosed. Rather, the present inventionencompasses all modifications, combinations, equivalents, variations,and alternatives falling within the scope of the present disclosure asdefined by the following appended claims and their legal equivalents.

What is claimed is:
 1. A device comprising a string driver, the stringdriver comprising: at least one pillar extending vertically between apair of electrodes, the at least one pillar comprising: a channel regionbetween a drain region and a source region; and a dielectric material ina central portion of the at least one pillar, the channel regionlaterally surrounding the dielectric material, wherein at least one ofthe channel region, the drain region, and the source region comprises ahigh band gap material; and only one gate region laterally surroundingthe channel region of a pillar of the at least one pillar, the gateregion comprising an electrically conductive material and spaced fromthe high band gap material, wherein each electrode, of the pair ofelectrodes, comprises a vertically extending portion surrounding by aportion of the high band gap material.
 2. The device of claim 1, whereinthe high band gap material is selected from the group consisting of zincoxide, indium gallium zinc oxide, indium zinc oxide, silicon carbide,tin oxide, and gallium arsenide.
 3. The device of claim 2, wherein thehigh band gap material comprises amorphous indium gallium zinc oxide. 4.The device of claim 1, wherein the channel region comprises the highband gap material.
 5. The device of claim 4, further comprising anotherdielectric material spacing the high band gap material of the channelregion from the gate region.
 6. The device of claim 1, wherein the drainregion and the source region are each spaced from the channel region byan offset region of about 0 micrometers (about 0 μm).
 7. The device ofclaim 1, wherein the channel region comprises the high band gap materialand another high band gap material laterally surrounding the dielectricmaterial.
 8. The device of claim 1, wherein the at least one pillarcomprises: a pillar comprising the channel region, the drain region, andthe source region; and another pillar comprising another channel region,another drain region, and another source region, at least one of theother channel region, the other drain region, and the other sourceregion comprising the high band gap material, the gate region laterallysurrounding the channel region and the other channel region.
 9. Thedevice of claim 1, wherein: the channel region comprises the high bandgap material; the channel region further comprises another high band gapmaterial laterally between the high band gap material and the gateregion; and the gate region laterally surrounds both the high band gapmaterial and the other high band gap material.
 10. The device of claim1, wherein the vertically extending portion of each electrode, of thepair of electrodes, extends vertically past an end of the gate region.11. The device of claim 1, wherein the drain region and the sourceregion are each spaced from the channel region by an offset region ofless than 0.2 micrometers (less than 0.2μm) but greater than 0.1micrometers (greater than 0.1μm).
 12. A device, comprising: an array ofcharge storage devices; access lines in operable communication with thearray of charge storage devices; and a string driver in operablecommunication with at least one access line of the access lines, thestring driver comprising: at least one pillar extending verticallybetween a pair of electrodes, the at least one pillar comprising: achannel region between a drain region and a source region; and adielectric material in a central portion of the at least one pillar, thechannel region laterally surrounding the dielectric material, wherein atleast one of the channel region, the drain region, and the source regioncomprises a high band gap material; and only one gate region laterallysurrounding the channel region of a pillar of the at least one pillar,the gate region comprising an electrically conductive material andspaced from the high band gap material, wherein each electrode, of thepair of electrodes, comprises a vertically extending portion surroundedby a portion of the high band gap material.
 13. The device of claim 12,wherein the array of charge storage devices is a three-dimensional NANDarray comprising a plurality of stacked tiers of the charge storagedevices.
 14. The device of claim 12, wherein the string driver comprisesa plurality of the pillars of the at least one pillar, the one gateregion laterally surrounding the channel regions of the pillars of theplurality.
 15. The device of claim 12, wherein: the source regioncomprises the high band gap material doped with at least one dopant; andthe drain region comprises the high band gap material doped with the atleast one dopant, the at least one dopant selected from the groupconsisting of aluminum (Al) and silicon (Si).
 16. A system, comprising:an array of non-volatile memory devices; at least one string driver inoperable communication with the array, a string driver, of the at leastone string driver, comprising: at least one pillar extending verticallybetween a pair of electrodes, the at least one pillar comprising: achannel region between a drain region and a source region; and adielectric material in a central portion of the at least one pillar, thechannel region laterally surrounding the dielectric material, wherein atleast one of the channel region, the drain region, and the source regioncomprises a high band gap material; and only one gate region laterallysurrounding the channel region of a pillar of the at least one pillar,the gate region comprising an electrically conductive material andspaced from the high band gap material, wherein each electrode, of thepair of electrodes, comprises a vertically extending portion surroundedby a portion of the high band gap material; and at least one peripheraldevice in operable communication with the array of non-volatile memorydevices, the at least one peripheral device comprising circuitry inoperable communication with the at least one string driver.
 17. A methodof forming a string driver, the method comprising: forming, on anelectrode over a base material, a pillar comprising a dielectricmaterial in a central portion of the pillar and comprising a high bandgap material laterally surrounding the dielectric material; forminganother dielectric material adjacent the high band gap material; andforming a region of an electrically conductive material adjacent theother dielectric material, the region of the electrically conductivematerial spaced from the high band gap material by at least the otherdielectric material; forming another electrode on the pillar, whereinthe pillar extends vertically between a pair of electrodes, the pair ofelectrodes comprising the electrode and the other electrode, the pillarcomprising: a channel region between a drain region and a source region;and the dielectric material in the central portion of the pillar, thechannel region laterally surrounding the dielectric material, wherein atleast one of the channel region, the drain region, and the source regionof the string driver comprises the high band gap material, wherein thestring driver comprises only one gate region laterally surrounding thechannel region of the pillar, the gate region comprising theelectrically conductive material, wherein the gate region is spaced fromthe high band gap material, and wherein each electrode, of the pair ofelectrodes, comprises a vertically extending portion surrounded by aportion of the high band gap material.
 18. The method of claim 17,wherein forming the pillar comprising the high band gap materialcomprises depositing the high band gap material at a temperature of lessthan 400° C.
 19. The method of claim 17: further comprising, beforeforming the pillar, forming an additional dielectric material over thebase material; and wherein forming the pillar comprises: forming anopening through the additional dielectric material; forming the otherdielectric material in the opening; forming the high band gap materialon the other dielectric material; and forming the dielectric material onthe high band gap material.
 20. The method of claim 17, furthercomprising doping portions of the high band gap material to form thedrain region and the source region, the drain region comprising dopedhigh band gap material, the source region comprising doped high band gapmaterial, the drain region being spaced from the source region by anundoped portion of the high band gap material.
 21. The method of claim20: further comprising, before forming the pillar: forming anotherelectrically conductive material supported by the base material, theelectrode comprising the other electrically conductive material; anddoping the other electrically conductive material with at least onedopant; and wherein forming the pillar comprises forming the high bandgap material in physical contact with the other electrically conductivematerial doped with the at least one dopant; and wherein doping portionsof the high band gap material comprises: exposing at least a lowerportion of the high band gap material to heat to cause the at least onedopant to diffuse from the other electrically conductive material intothe lower portion of the high band gap material; and implanting anadditional amount of the at least one dopant into an upper portion ofthe high band gap material.
 22. The method of claim 17, wherein: formingthe region of the electrically conductive material precedes forming theother dielectric material and precedes forming the high band gapmaterial; forming the other dielectric material comprises: forming anopening through the electrically conductive material; and forming theother dielectric material on the electrically conductive materialexposed in the opening; and forming the pillar comprises forming thehigh band gap material on the other dielectric material.
 23. The methodof claim 22, further comprising forming another high band gap materialalong the high band gap material.
 24. The method of claim 17, wherein:forming the other dielectric material precedes forming the high band gapmaterial, and forming the region of the electrically conductive materialprecedes forming the other dielectric material, the other dielectricmaterial spacing the electrically conductive material from the high bandgap material.